Abstract: Taking Anhui Province as an example, the entropy weighting method was used to evaluate the industrial pollution situation. Based on STIRPAT model, the typical correlation and partial least squares regression analysis methods were adopted to investigate the influence effect of industrial pollution caused by high-tech industry. The results showed that firstly, the pollution index decreased from 0.537 1 in 2005 to 0.469 3 in 2015 with annual average reduction of 1.34%. Secondly, the driving factors of industrial pollution include high-tech industry development, economic growth, fixed asset investments, urbanization, per capital household consumption level, direct foreign investment, environmental regulation policies, industrial structure and marketization degree. Thirdly, the high-tech industry development, economic growth, urbanization level, per capital household consumption level and the interaction terms of economic development and high-tech industry development make significant inhibitory effects on industrial pollution; with their increase rate of 1%, the industrial pollution index is caused to decrease by 0.087 8%, 0.047 0%, 0.000 9%, 0.027 6% and 0.259 8% respectively. Fourthly, the fixed asset investments, industrial structure, direct foreign investment, marketization degree and environmental regulation have positive driving effects on industrial pollution; when increasing by 1%, the industrial pollution index increases by 0.036 6%, 0.000 2%, 0.271 8%, 0.008 1% and 0.031 8% respectively.